Thermal and ambient‐induced deflections of scanning force microscope cantilevers

T Thundat, RJ Warmack, GY Chen… - Applied Physics Letters, 1994 - pubs.aip.org
The deflection of scanning force microscope cantilevers, metal coated on one side, is
significantly influenced by both thermal heating and variations in relative humidity. For
constant relative humidity, the deflection of the cantilever drifts due to laser heating and
eventually reaches a steady‐state value. For a thermally stabilized cantilever, the deflection
varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes
the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever …